Honeywell ZephyrTM Digital Airflow Sensors: HAF Series-High Accuracy 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM Datasheet Honeywell ZephyrTM Digital Airflow Sensors HAF Series - High Accuracy Honeywell ZephyrTM HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC). The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 C to 50 C [32 F to 122 F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms. These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow. Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards. What makes our sensors better? Precise measurement: The industry's smallest Total Error Band, fast response time, and high accuracy provide precise measurement and high performance in the customer's application Saves time: Configurable and customizable with a choice of port styles simplifies design and reduces production time Cost-effective: Reduces printed circuit board (PCB) size and overall design and production costs TIGHT TOTAL ERROR BAND * high accuracy * fast response 2 sensing.honeywell.com Features and Benefits Precise measurement maximizes performance. TOTAL ERROR BAND (TEB)* Honeywell specifies TEB, the most comprehensive, clear, and meaningful measurement that provides the sensor's true accuracy (see Figure 1). TEB allows for precise airflow measurement, often ideal for demanding applications with high accuracy requirements for precise airflow measurement. * 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM: - 0 %FS to 12.5 %FS = 0.5% FS - 12.5 %FS to 100 %FS = 4.0% reading * 300 SLPM only: - 0 SLPM to 199 SLPM = 0.5% FS or 4.0% reading - 200 SLPM to 300 SLPM = 7.0% reading All Possible Errors Offset + Full Scale Span + Linearity = Accuracy + Flow Hysteresis + = Total Error Band Repeatability + Temperature Offset + Temperature Span + Thermal Hysteresis Figure 1. Total Error Band vs. Accuracy Other airflow sensor manufacturers only report on accuracy, while Honeywell reports Total Error Band. HIGH ACCURACY Ideal for use in demanding applications that require high accuracy. * 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM: - 0 %FS to 14.3 %FS = 0.5% FS - 14.3 %FS to 100 %FS = 3.5% reading * 300 SLPM only: - 0 %FS to 14.3 %FS = 0.5% FS - 14.6 %FS to 100 %FS = 3.5% reading *Competitive Differentiator sensing.honeywell.com 3 Features and Benefits FAST RESPONSE TIME (1 ms) Allows the customer's application to respond quickly to a change in airflow, important in critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications. High stability Reduces errors due to thermal effects and null shift, providing accurate readings over time and often eliminating the need for system calibration after PCB mount and periodically over time. High sensitivity at very low flows Provides a fast response time at the onset or cessation of flow. High 12-bit resolution Increases the ability to sense small airflow changes, allowing customers to more precisely control their application. Simplifies design and integration while reducing costs. Wide airflow range* The industry's broadest airflow range measures mass flow with standard flow ranges of 0-10 SLPM, 0-15 SLPM, 0-20 SLPM, 0-50 SLPM, 0-100 SLPM, 0-200 SLPM, and 0-300 SLPM, or custom flow ranges, increasing the options to integrate the sensor into the application. Choice of port styles* Manifold mount, 22 mm OD tapered male fitting, and G 3/8 female threaded fitting provide flexibility to choose the pneumatic connection that is best for the customer's application. Linear output* Provides a more intuitive sensor signal than the raw output of basic airflow sensors, which can help reduce production costs, design, and implementation time. Wide supply voltage range [3 Vdc to 10 Vdc] Flexible regulated power circuit allows the designer the flexibility to choose the supply voltage that works best in the system. ASIC-based I2C digital output Simplifies integration to microprocessors or microcontrollers, reducing PCB complexity and component count. Factory or custom calibration for multiple gas types Can be factory calibrated for gas types such as dry air, helium (He), argon (Ar), nitrogen (N2), nitrous oxide (N2O), and carbon dioxide (CO2), or custom calibrated for the end customer, eliminating the need to implement gas correction factors. RoHS-compliant materials Meet Directive 2002/95/EC. 4 sensing.honeywell.com *Competitive Differentiator Potential Applications MEDICAl Anesthesia Delivery machines Ventilators Ventricular Assist Devices (Heart Pumps) Spirometers Laparoscopy INDUSTRIAL ANALYTIC INSTRUMENTATION (SPECTOMETRY, CHROMATOGRAPHY) AIR-TO-FUEL RATIO FUEL CELLS FUME HOODS GAS LEAK DETECTION Process control gas monitoring Vacuum pump monitoring sensing.honeywell.com 5 Honeywell ZephyrTM Digital Aiflow Sensors HAF Series-High Accuracy Table 1. Absolute Maximum Ratings1 Characteristic Parameter Supply voltage -0.3 Vdc to 11.0 Vdc Voltage on digital I/O output pins -0.3 Vdc to 3.0 Vdc2 Storage temperature range Maximum flow change Maximum common mode pressure Maximum flow -40 C to 100 C [-40 F to 212 F] 10,000 SLPM/s 60 psi at 25 C [77 F] 350 SLPM Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings. 1 Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to 2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors 2 CAUTION CAUTION IMPROPER USE PRODUCT DAMAGE Do not use these products to sense liquid flow Do not dissamble these products. Failure to comply with these insturctions may result in product damage. Failure to comply with these insturctions may result in product damage. Table 2. Operating Specifications Characteristic Parameter Supply voltage 3 Vdc to 10 Vdc Supply current 20 mA max. Power: 3 Vdc 10 Vdc 60 mW max. 200 mW max. Calibrated temperature range1 0 C to 50 C [32 F to 122 F] Operating temperature range -20 C to 70 C [-4 F to 158 F] Full scale (FS) flow2 Calilbrated flow range Calibration gas3 Accuracy 0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM: 0 %FS to 14.3 %FS 14.3 %FS to 100 %FS 300 SLPM only: 0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) 14.6 %FS to 100 %FS (44 SLPM to 300 SLPM) 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM 0 to 10 SLPM, 0 to 15 SLPM, 0 to 20 SLPM, 0 to 50 SLPM, 0 to 100 SLPM, 0 to 200 SLPM, 0 to 300 SLPM clean, dry air 4 6 sensing.honeywell.com 0.5% FS 3.5% reading 0.5% FS 3.5% reading 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM Table 3. Operating Specifications (continued) Characteristic Parameter Total Error Band: 5 0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM: 0 %FS to 12.5 %FS 0.5% FS 12.5 %FS to 100 %FS 4.0% reading 300 SLPM only: 0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) 0.5% FS 14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM) 4.0% reading 66.6 %FS to 100 %FS (200 SLPM to 300 SLPM) 7.0% reading 0.5 %FS Null accuracy6 Flow response time7 1 ms Warm up time8 35 ms Resolution: 10 SLPM 15 SLPM 20 SLPM 50 SLPM 100 SLPM 200 SLPM 300 SLPM 0.002 SLPM 0.003 SLPM 0.003 SLPM 0.008 SLPM 0.015 SLPM 0.020 SLPM 0.030 SLPM Bus standards9 I2C fast mode (up to 400 kHz) Proof pressure 150 psig Burst Pressure 200 psig Reverse polarity protection no Custom and extended temperature compensated ranges are possible. Contact Honeywell for details. 1 Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0 C and 1 atm. Custom units are given as LPM with listed reference conditions at the first mention. 2 Contact Honeywell for requirements with other custom gases for calibration. See the Technical Note "Gas Media Compatibility and Correction Factors". 3 Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25 C. Errors include Offset, Full Scale Span, Linearity, Flow Hysteresis, and Repeatability. (See Figures 1 and 5.) 4 Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band includes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature Span and Thermal Hysteresis. (See Figures 1 and 5.) 5 6 Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range. Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic interface). 7 Warm-up time: time to the first valid flow measurement after power is applied. 8 9 Refer to the Technical Note "I2C Communications with Honeywell Digital Airflow Sensors" for I2C protocol information. sensing.honeywell.com 7 Honeywell ZephyrTM Digital Aiflow Sensors HAF Series-High Accuracy Table 4. Compatible Gases Gas Dry air Calibration Type standard Helium (He) Argon (Ar) Nitrogen (N2) optimized calibration available Nitrous oxide (N2O) Carbon dioxide (CO2) Oxygen (O2) 80/20 He/O2 Mix Methane (CH4) See the Technical Note "Gas Media Compatibility and Correction Factors". Xenon (Xe) Table 5. Environmental Specifications Characteristic Humidity Shock Vibration ESD Radiated immunity: test conditions for 20 SLPM test conditions for 20 SLPM Parameter 0% to 95% RH, non-condensing 30 g, 6 ms 1.33 g at 10 Hz to 500 Hz ESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV Level 3 from 80 MHz to 1000 MHz per IEC61000-4-3 1 meter shielded cable with 3 cm exposed leads at connector 1 meter shielded cable with 3 cm exposed leads at connector and 280 Ohm at 1 MHz ferrite bead Table 6. Materials Specifications Characteristic Parameter Wetted materials glass reinforced (GR) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy, PCB epoxy composite Housing GR thermoplastic polymer Substrate PCB Adhesives epoxy Electronic components Compliance 8 sensing.honeywell.com silicon, gold RoHS, WEEE 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM Table 7. Recommended Mounting and Implementation Characteristic Parameter Mounting screw size 10-32 Mounting screw torque 1,13 N m [20 in-lb] Electrical connection 6 pin SIP connector Honeywell ZephyrTM Airflow Sensors, HAF Series-High Accuracy, Pneumatic connection manifold mount, 22 mm OD tapered male fitting, G 3/8 female threaded fitting 20 SLPM or 200 SLPM, Product Nomenclature Figure 2. Nomenclature and Order Guide1 For example, a HAFUHM0020L4AXT part number defines a Honeywell ZephyrTM Airflow Sensor, unidirectional flow, long port, manifold mount, 20 SLPM, I2C output with custom 0x49 address, 10% to 90% transfer function, 3 Vdc to 10 Vdc supply voltage. HAF U HM 0020 L 4 A X T Product Series Flow Direction Port Style Flow Range Unit Output Format Transfer Function Reserved for Future Use Supply Voltage X XXXXX T 3 Vdc to 10 Vdc HAF Series high accuracy airflow sensor U Unidirectional HM Manifold HH 0010 10 L SLPM I C address: 2 Digital 0x29 2 mount 0015 15 I2C address: 3 Digital 0x39 22 mm OD tapered male fitting per ISO 5356 0020 20 4 0x49 0050 50 I2C address: 5 Digital 0x59 G 3/8 female 0100 100 2 6 Digital I C address: 0200 2 7 Digital I C address: HT threaded fitting per ISO 1179 200 A 10% to 90% of input Digital I2C address: 0x69 0x79 0300 300 Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell. 1 Figure 3. All Available Standard Configurations Manifold mount 008270-1-EN IL50 GLO December 2012 Copyright (c) 2012 Honeywell International Inc. All Rights Reserved. 22 mm OD tapered male fitting G 3/8 female threaded fitting Notes: 1. The long port style with the snap mount housing style is not a valid configuration. 2. The 200 SCCM flow range is available in the long and short port styles. 3. Apart from the general configuration required, other customer-specific requirements a Please contact Honeywell. sensing.honeywell.com 9 Honeywell ZephyrTM Digital Aiflow Sensors HAF Series-High Accuracy Figure 4. Nominal Digital Output: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM Digital Output (counts) 18018 16380 14742 13104 11466 9828 8190 6552 4914 3276 1638 0 0 Full Scale Flow (%) 100 Figure 5. Accuracy and Total Error Band 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM 300 SLPM only 8.00% TEB =4. 67% at 200 SLPM 7.00% 6.00% TEB= 2.65% at 199 SLPM 4.00% 3.00% 3.00% 2.00% 2.00% Error (%FS) Error (%FS) 5.00% 4.00% 1.00% 0% -1.00% 0% -1.00% -2.00% -3.00% -3.00% 0 10 20 30 Ideal 40 50 %FS 60 Accuracy 70 0 %FS to 14.3 %FS = 0.5% 14.3 %FS to 100 %FS = 3.5% Total Error Band 0 %FS to 12.5 %FS = 0.5% 12.5 %FS to 100 %FS = 4% 80 90 100 TEB = 0.5% at 43 SLPM 1.00% -2.00% -4.00% TEB = 7.00% at 300 SLPM -4.00% -5.00% -6.00% -7.00% -8.00% 0 10 20 30 Ideal 40 50 %FS 60 70 80 90 100 Accuracy 0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5% 14.6 %FS to 100 %FS (44 SLPM to 300 SLPM) = 3.5% Total Error Band 0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5% 14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM) = 4% reading 66.6 %FS to 100 %FS (200 SLPM to 300 SLPM) = 7% reading 10 sensing.honeywell.com 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM Figure 6. Flow vs Pressure Drop: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM Flow (SLPM) Flow vs. Pressure Drop: 0 to 300 SLPM Pressure Drop (psi) N 3.00000 2.50000 2.00000 1.50000 psi inH2O 0 0 0.00000 0.04153338 1 0.1034586 0.00150 0.04153338 2 0.20582424 0.00298 0.04153338 4 0.39645192 0.00575 0.04153338 8 0.80254866 0.01163 0.04153338 10 1.02721818 0.01489 0.04153338 12 1.27909578 0.01854 0.04153338 14 1.54899066 0.02245 0.04153338 15 1.68593772 0.02443 0.04153338 16 1.82026278 0.02638 0.04153338 18psi 1.00000 0.50000 0.00000 0 50 100 150 200 250 Flow (SLPM) 300 350 Typical Pressure Drop mbar 2.12584308 0.03081 0.04153338 20 2.44420632 0.03542 0.04153338 25 3.32048838 0.04812 0.04153338 50 9.3139443 0.13498 3.73907619 75 17.55251808 0.13498 7.046445664 100 27.97855332 0.13498 11.23196996 125 40.53260928 0.13498 16.27178662 150 54.8812269 0.79538 22.03202877 175 71.15758308 1.03127 28.5661601 200 89.5064674 1.29720 35.93230649 225 109.3632281 1.58497 43.90378866 250 131.0373825 1.89909 52.60486225 275 154.388940 2.23752 61.97932838 300 179.2351535 2.59761 71.95382248 Table 8. Ideal Transfer Function Item Equation Digital Output Code 16384 * [0.1 + 0.8 * (Flow Applied/Full Scale Flow)] Flow Applied Full Scale Flow * [(Digital Output Code/16384) - 0.1]/0.8 Digital Interface For additional details on the use of Zephyr with digital output see the Technical Note "I2C Communications with Honeywell Digital Airflow Sensors". The sensor uses the I2C standard for digital communication with a slave address specified in the Nomenclature and Order Guide in Figure 2. Following sensor power-up, each of the first two read sequences shown in Figure 7 will respond with 2 bytes of the unique 4-byte Serial Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will respond with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor startup time before performing the first read, then allow a 10 ms command response time before performing the second read. sensing.honeywell.com 11 Honeywell ZephyrTM Digital Aiflow Sensors HAF Series-High Accuracy Figure 7. Sensor I2C Read and Write Sequences I2C Read: Slave responds to Master with data Data Byte 0 (Most Significant) SDA SCL Data Byte 1 (Least Significant) S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 MA D7 D6 D5 D4 D3 D2 D1 D0 MN S I2C Read: Master sends data to Slave Command Byte SDA SCL S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 SA S Bit Name Description S Start condition Master pulls SDA from high to low while SCL remains high S Stop condition Master allows SDA to float from low to high while SCL remains high Address bit I2C Slave Address is the 7 Most Significant Bits for the first transmitted byte Read/write bit Read = 1, Write = 0 A6 1 D7 Data bit SA Slave ACK Slave pulls SDA low MA Master ACK Master pulls SDA low MN Master NACK Master allows SDA to float high After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading. Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be `00', while non-flow responses (such as error and status codes) will begin with `11'. There are several user commands available as shown in Table 9. Following an I2C write sequence of a user command, the sensor will respond to the next I2C read request with a 16-bit response. Possible responses to user commands can be seen in Table 10. Table 9. User Command Descriptions Command Byte (Hexadecimal) Command Name Command Description Command Response Time (Max.) 0x01 GetSerialNumber Next two read requests will each return two bytes of the sensor's unique 4-byte Serial Number. 10 ms 0x02 PowerOnReset Force Power-On reset of sensor microcontroller. 20 ms Checksum Calculates EEPROM Checksum and compares to production Checksum value. If the values match, the next read request will respond with 0xCCA5. Otherwise, the next read will respond with 0xCC90. 1s 0x03 10 Table 10. Sensor Response Descriptions Sensor Response (Hexadecimal) Response Name Response Description 0xCCA5 POSACK non-response command was executed successfully 0xCC99 BadCommand command byte was not recognized 0xCC9A BadParam command sent with incorrect parameter bytes 0xCC9B Failure command failed during execution 0xCC90 BadChecksum checksum did not match stored value 0xCCBB Busy sensor is busy calculating the checksum value The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum supply voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 k to limit the sink current to 2 mA. The typical value for SCL and SDA pull-up resistors is 4.7 k (this value depends on the bus capacitance and the bus speed). 12 sensing.honeywell.com 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM Figure 8. Mounting Dimensions (For reference only: mm [in].) Port Style: Manifold Mount Mounting Footprint 71,2 [2.80] 8 [0.3] 55,2 [2.17] 30,0 [1.2] 14,6 [0.58] A 16,0 [0.63] 4X 5,60 [0.220] 4X 5,20 [0.205] 16,0 [0.63] 71,2 [2.80] 55,2 [2.17] 30,6 [1.20] 4X 15,0 [0.59] A 22,0 [0.87] 54,4 [2.14] 44,0 33,0 [1.73] 54,4 [1.30] [2.14] 14,5 44,0 [0.57] [1.73] 8 [0.3] 4,0 [0.16] B 51,5 [2.03] 34,5 [1.36] 33 [1.3] 42,4 [1.67] 22,0 [0.87] 4,0 [0.16] 54 [2.1] 2X 13,0 DIA. [0.51] D 87 [3.4] A Pin 1. 4X 4,50 [0.177] B 4X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C 2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm [0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durometer A65 to A80 Silicon or Viton, are required to seal sensor to manifold. O-rings are not included. C 87 [3.4] 63,2 [2.49] D Flow channel. 63,2 [2.49] Port Style: 22 mm OD Tapered Male Fitting per ISO 5356 14 [0.6] 39,5 [1.56] 18,3 [0.72] 21,0 [0.83] 2X 5,70 [0.22] 14,8 [0.58] A Mounting Footprint 2X 5,20 [0.205] 14,5 [0.57] 54,4 [2.14] 44,0 [1.73] 44,0 35,1 [1.73] [1.38] 54,4 [2.14] 2X 21,0 [0.83] C 18,0 [0.71] 30 [1.2] 110 [4.3] 14,8 [0.58] A 14,5 [0.57] B 68 [2.7] 39.5 [1.56] 14 [0.6] 35 [1.4] 42,4 [1.67] 54 51,5 [2.1] [2.03] 2X 4,50 [0.177] 68 [2.7] 2X 18,3 [0.72] A Pin 1. B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C 15 mm ID/22 mm OD tapered fitting per ISO 5356. sensing.honeywell.com 13 Honeywell ZephyrTM Digital Aiflow Sensors HAF Series-High Accuracy Figure 8. Mounting Dimensions (For reference only: mm [in], continued.) Port Style: G 3/8 Female Threaded Fitting per ISO 1179 16 [0.63] 2X 1,5 [0.06] Mounting Footprint 39,5 [1.56] 2X 18,3 [0.72] 2X 5,70 [0.22] 14,8 [0.58] A 16 [0.63] 2X 1.5 [0.06] 2X 5,20 [0.205] B 71 [2.8] C 18,0 [0.71] 30,0 [1.18] 71,4 [2.81] 44,0 35,1 [1.73] [1.38] 54,4 [2.14] 14,5 [0.57] 44,0 [1.73] 54,4 14,5 [0.57] [2.14] 34,5 [1.36] 39,5 [1.56] 14,8 [0.58] A 51,5 [2.03] A Pin 1. 54 [2.1] B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C ISO 1179 G3/8, recommended torque is 1,7 0,6 N m [15 5 in lb]. Electrical connector part number is JST (Japan Solderless Terminals) B6B-PH-K-S. Mating connector part numbers are JST PHR-6 (socket) and JST SPH-002T-P0.5L (crimp terminal). 2X 4,50 [0.177] 35 [1.4] 42,4 [1.67] 2X 18,3 [0.72] Table 11. Pinout (Digital Function) 14 Pin 1 Pin 2 Pin 3 Pin 4 Pin 5 Pin 6 NC SCL VVDD ground SDA NC sensing.honeywell.com 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM WARNING ADDITIONAL INFORMATION The following associated literature is available at sensing.honeywell.com: * Product line guide * Product Part Listing/Nomenclature Tree * Product Range Guide * Technical Information PERSONAL INJURY DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. - I2C Communications with Honeywell Digital Airflow Sensors - Gas Media Compatibility and Correction Factors * Datasheet WARNING MISUSE OF DOCUMENTATION * * Application Specific Information * The information presented in this product sheet is for reference only. Do not use this document as a product installation guide. Complete installation, operation, and maintenance information is provided in the instructions supplied with each product. Failure to comply with these instructions could result in death or serious injury. WARRANTY/REMEDY Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. Honeywell's standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer's sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages. While we provide application assistance personally, through our literature and the Honeywell website, it is up to the customer to determine the suitability of the product in the application. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this issue; however, we assume no responsibility for its use. sensing.honeywell.com 15 Sales and Service Honeywell serves its customers through a worldwide network of sales offices, representatives and distributors. For application assistance, current specifications, pricing or name of the nearest Authorized Distributor, contact your local sales office or email us at info.sc@honeywell.com. Visit us on the Web at sensing.honeywell.com Phone and Fax: Asia Pacific +65 6355-2828 +65 6445-3033 Fax Europe +44 (0) 1698 481481 +44 (0) 1698 481676 Fax Latin America +1-305-805-8188 +1-305-883-8257 Fax USA/Canada +1-800-537-6945 +1-815-235-6847 +1-815-235-6545 Fax Sensing and Control Honeywell 1985 Douglas Drive North Golden Valley, MN 55422 honeywell.com 008268-4-EN January 2014 2014 Honeywell International Inc. All rights reserved.